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Microelectronics Industry
I i O ^4 I
Kj.o. wopai (.liicfii^ wi iiXiwwi
Occupational Safety and Health Administration
1988 "
I A n-4 r\T
uonM a lU/
Report Documentation Page
Report Date Report Type
00001988 N/A
Dates Covered (from... to)
Title and Subtitle
Contract Number
Safety and Health Guide for the Microelectronics
Industry
Grant Number
Program Element Number
Author(s)
Project Number
Task Number
Work Unit Number
Performing Organization Name(s) and Address(es)
U.S. Dept of Labor Occupational Safety & Health
Administration 200 Constitution Avenue Washington,
DC 20210
Performing Organization Report Number
OSHA-3107
Sponsoring/Monitoring Agency Name(s) and
Sponsor/Monitor’s Acronym(s)
Address(es)
Sponsor/Monitor’s Report Number(s)
Distribution/Availability Statement
Approved for public release, distribution unlimited
Supplementary Notes
Abstract
The microelectronics industry employs about 180,000 workers nationally. Of these, about 95,000 are
employed in the manufacture of semiconductor components and integrated circuits; about 60,000 are
employed in the production of capacitors, resistors, and condensers; the balance manufacture
miscellaneous electronics products. The popular impression of this high-technology industry is of
employees wearing the white suits in clean, bright comfortable workplaces. Although accurate in many
cases, many of the high-tech workers in this industry risk exposure to a wide variety of hazardous
substances. Scientific studies conducted in the United States and Europe have identified numerous
hazardous conditions and resultant high rates of occupational illnesses within the industry.
Subject Terms
Report Classification
unclassified
Classification of this page
unclassified
Classification of Abstract
unclassified
Limitation of Abstract
UU
Material contained in this publication is in the
public domain and may be reproduced, fully or
partially, without permission of the Federal
Government. Source credit is requested but not
required.
Safety & Health Guide
M _J.I_
Tor me
■in iAIA t r r% i
IVII%#I \/l II
Imrli letm
II IVIUOtl j
U.S. Department of Labor
Ann McLaughlin, Secretary
uccupaiionai i^aieiy ana neaiin Aammisiraiion
D H »* r» f <3 e o
I vi^i ivuGi as7>^.
1988
OSHA3107
Contents
Ifitrnriyrtjnri
Potential Hazards. 4
Solvents. 4
Acids and Alkalis . 4
Metals. 4
G3S6S. 4
Plastics and Resins . 4
Polychlorinated Biphenyls. 4
Fiberglass and Asbestos. 4
AHHjtjnnflj HSZSfdS 4
Noise Exposure . 5
Electric Shock. 5
Carpai Tunnel Syndrome . 5
Control Measures.. s
Pngjnoanng Qnntrnjc
Closed Systems .
Changing a Process.
Isolation .
VA/Af
mw\^K ... .
Local Exhaust Ventilation . . .
General Ventilation.
Administrative Controls .
Worker Rotation .
Substitution.
Personal Protective Equipment
Other Protective Measures ...
Personal Hygiene.
Regulated Areas.
Medical Surveillance .
Equipment Maintenance ...
Good Housekeeping.
Training.
6
6
6
c
6
6
6
c
W
6
6
7
7
7
7
7
7
7
Responding to Workplace Emergencies. 8
Planning.
Chain of Command .
Emergency Response Teams
Response Activities .
Training.
Personal Protection .
Medical Assistance .
Hazard Communication
9
Recordkeeping. 9
Employee and Employer Responsibilities.10
Appendix. 11
References
12
00 <0 CO CO C7> O) CJ)
Introduction
The microelectronics industry employs about
180,000 workers nationally. Of these, about 95,000
are employed in the manufacture of semiconductor
components and integrated circuits; about 60,000
are employed in the production of capacitors,
resistors, and condensers; the balance
manufacture miscellaneous electronics products.
The popular impression of this high-technology
industry is of employees wearing white suits in
clean, bright, comfortable workplaces. Although
accurate in many cases, many of the high-tech
workers in this industry risk exposure to a wide
variety of hazardous substances. Scientific studies
conducted in the United States and Europe have
identified numerous hazardous conditions and
resultant high rates of occupational illnesses within
the industry.
Many microelectronics production processes
involve chemical interactions, chemical cleaning,
and various light and radiation exposures. Most
work is completed on an assembly line with a very
fine level of detail and precision. Hazards range
from acute and chronic exposures to toxic
chemicals, to radiation and electric shock, and to
stress and fatigue.
Briefly, hazards can be categorized as resulting
from exposure to solvents, alkalis, metals, gases,
vapors, radiation, and from workplace stress. In
addition, other potential hazards that employees
and employers should be aware of include falls,
overexertion, sprains/strains and injuries from
stationary objects or from being caught in, under,
or between objects.
This publication is designed to encourage
electronics industry employers to review and
strengthen overall safety and health precautions to
guard against workplace accidents, injuries, and
illnesses. It contains discussions of the various
hazards in the industry and the various means of
controlling them to protect exposed workers.
Control measures may be reviewed by Compliance
Safety and Health Officers (inspectors) of the
Occupational Safety and Health Administration
(OSHA) during workplace inspections to evaluate
employer safety programs, particularly in the areas
of accident prevention and emergency response.
This publication also includes a list of acutely toxic
chemicals whose presence in the workplace should
signal the need for stringent safety and health
measures to protect workers (see Appendix).
Although the following discussions focus on the
conditions and processes found in the electronics
industry, including (but not limited to) firms in
Standard Industrial Classification (SIC) 3674
(Semiconductors and Related Devices) and 3679
(Electronic Components), they are written for a
variety of workplaces that produce similar
industrial and consumer products.
OSHA also publishes a manual entitled, “How to
Prepare for Workplace Emergencies” (OSHA 3088),
which can help any type of business in developing
an emergency plan. A single free copy may be
obtained from any OSHA Regional Office, listed in
this publication.
3
Potential Hazards
in this industry, production workers are those most
frequently exposed to hazardous conditions.
Nearly every production job involves the use of
chemicals for cleaning, stripping, or degreasing
parts and equipment. Maintenance personnel who
<antAr nr rnnfinoH cr^aroc ara alcn
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exposed to toxic substances.
Solvents
Solvents are used to dissolve various materials.
Those commonly used include trichloroethylene,
toluene, acetone, methylene chloride,
perchioroethyiene, glycol ether, isopropyl alcohol,
chloroform, xylene, and freon. E.xposure occurs
by skin absorption and by inhalation. Skin
exposure may result in dermatitis or skin rash,
edema or swelling, and blistering. These exposures
can result from chemical splashes and spills, from
directly immersing one's hands into solvents and
chemicals, from contact with solvent-soaked
clothing or soivent-wet objects, and from the use of
improper personal protective equipment. Solvents
can dissolve the body’s natural protective barrier of
fats and oils leaving the skin unprotected against
further irritation.
Metals
Metals are used for electroplating, etching,
soldering, bonding, sealing, crystallizing,
depositing, and metallizing. Employees are
exposed to metals primarily by skin contact and by
inhalation of metal dusts and fumes. Exposure may
CHUS6 hiGSdSCnGS, QGflGrSj ill-fGGiing, GPiGmiS,
central nervous system and kidney damage, and
reproductive problems, as well as cancer.
Gases are utilized in doping and crystal growing,
and may combine with other substances to
produce toxic gases such as phosgene, ozone, and
rarhnn mnnnxiriA Wnrkprc; nan hp pynnaprt tn
- . ------'I--
these gases if there are leaks in machines or
enclosures. Potential exposure to gases occurs
through inhalation. Such exposure may produce
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nausea, and possible kidney and liver damage.
Plastics and Resins
Plastics and resins are part of several high tech
processes. Inhalation or skin contact may occur
when curing resins; cutting, heating, or stripping
wires; or cutting, grinding, or sawing a hardened
product. Exposure to these substances may result
in skin rash and upper respiratory irritation.
Polychlorinated Biphenyls (PCBs)
In addition, the inhalation or absorption of solvents
may affect the central nervous system, acting as
depressants and anesthetics causing headaches,
nausea, drowsiness, dizziness, complaints of
irritation, abnormal behavior, general ill-feeling,
and even unconsciousness. These symptoms
should be viewed as visible signs of potential
disease. Excessive and continued exposure to
certain solvents may result in liver, lung, kidney,
and reproductive damage, as well as cancer.
Acids and alkalis are used for electroplating,
soldering, making fluxes, crystal polishing, and
metal pickling. These substances may cause
serious burns if they are splashed into the eyes or
onto the skin. If vapors or mists are inhaled, they
may result in a burning of the linings of the nose,
mouth, throat, and lungs.
PCBs are used as insulators in some electrical
equipment and present a potential hazard to
workers. Exposures to PCBs may cause skin
disorders, digestive problems, headaches, upper
respiratory irritations, reproductive problems, and
cancer.
Fihprnlass and Asbestos
' ---
Fiberglass and asbestos are also used as fillers in
epoxy resins and other plastics, in wire coatings or
electrical insulation, and in printed circuit boards.
Uncontrolled exposures may produce skin and
upper respiratory irritations and, in the case of
asbestos, cancer.
Additional Hazards
Maaiaiion, noise, ana occupaiionai siress are aisu
hazards to which workers in this industry can be
exposed. Job stress can result from prolonged
repetitive and monotonous detail work, overtime
and work speed-ups, as well as from lifting,
imnrrknor cittinn anH rM'nInnnpH QtanHinn
I. 1 ipi Wf-V-I ---
4
Noise Exposure The employer must monitor
noise exposure levels whenever employees are
exposed to noise at or above 85 decibels (dB)
av^ia^ctu u vvwi m
time-weighted average (TWA). Employees or their
representatives are entitled to observe monitoring
procedures and they must be notified of the
I t;aui lo.
Audiometric testing must be made available to all
employees who are exposed at or above levels of
85 uB over an 8-hour TWA, and the audiometric
testing follow-up should indicate whether hearing
loss is being prevented by the employer’s hearing
conservation program.
the employee can suffer from an inability to grip,
clumsiness, muscle atrophy, and constant wrist
pain.
Most employees and employers do not recognize
CTS as a work-related disorder. If not diagnosed
swiftly or if complications set in, CTS can cause
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laiiciii vji I oduii I ly .
sponsored by the National Institute for
Occupational Safety and Health (NIOSH) proves
that hand/wrist cumulative trauma disorders were
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work, and to a lesser extent with high
repetitiveness or high force alone, irrespective of
other factors.
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-- ■ ■ zf r- ■ - -- ----—--- --
exposed to a TWA of 85 dB or greater at no cost to
the employees, and employers must assure that all
employees exposed to or above the equivalence of
8-hours of noise of 85 dB use them. Workers must
be trained at least annually in the effect of noise, in
the purposes, advantages, and disadvantages of
various types of hearing protectors as well as in the
S6!6Ctjon, fit snd csrs of protoctors, snd tho
purpose and procedures of audiometric testing.
Electric Shock Electricity travels in closed
circuits, normally through a conductor. Shock
occurs when the body becomes a part of the
electric circuit. The current must enter the body at
one point and leave at another. Shock normally
occurs in one of three ways. The person must
come in contact with (1) both wires of the electric
circuit, (2) one wire of an energized circuit and the
ground, (3) or a metallic part that has become
“hot” by being in contact with an energized wire,
while the person is also in contact with the ground.
Employees and others working with electrical
equipment need to follow safe work practices.
These include deenergizing electrical equipment
before inspecting or making repairs, using
electrical tools that are in good repair, using good
judgment when working near energized lines, and
URinn annronriatf? nrntectivn nniiinmpnt
Carpal Tunnel Syndrome The carpal tunnel
syndrome (CTS) is a disorder of the hand which
nan afflirt r.imiit hnarri aQapmhlpra Thp rarnal
tunnel is a channel in the wrist through which the
median nerve and nine tendons pass. Flexing and
extending the wrist moves the tendons back and
forth SQuinst th© csn©! which C3n csus© Irritstlon
and swelling of the tendons. This, in turn, causes
pressure against the median nerve. This nerve
entrapment at first commonly causes numbness
fir»nlin/a in tHcs finn^f+tnc* A o\/mntnrr»
aiiw iiiiyiiiiy ni r\ ii 11 o y 111 p iv/i 11
is "nocturnal numbness,” a lack of sensation at
night when activity has ceased and muscle
movement does not help pump blood to the
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iiiiycji iipo. iiic piuuicm ucuuii ico mui c oci luuo.
Safety and health officials emphasize the
prevention of CTS by using special tools, changing
the work station and surface, matching employees
With f©w©r CTS factors to r©p6titiVG tasks, or
rotatino 6rnolov©©s th©r©hv reducinn thft avftranp
exposure to a highly repetitive task. These types of
changes can provide important side benefits such
as increased productivity and reduced employee
fatigue.
Control Measures
Engineering Controis
The seriousness of health effects is dependent
upon the particular substance and the amount to
which the worker is exposed, the duration of the
exposure, how often the exposure occurs, and how
the substance enters the body (skin absorption,
inhalation, or ingestion).
The preferred way of controlling potential
occupational safety and health hazards is through
the implementation of engineering controls.
Engineering controls prevent harmful worker
exposure through proper design of equipment and
nrn('P<?'?p<? Frpnupntlv nnninpprinn nnntrnlc; am
not built into the physical design of a particular
plant and have to be installed later. Types of
workplace engineering controis that can be
imnlomontaH inrliiHo rlnQC»H Qv/cstamc nrnrPiQcs
. I I ip.V-l 1 IV-I I I.WV- W.WWWN-.
change, isolation, wet methods, and ventilation.
5
Closed Systems Where possible, work that
involves potentially hazardous exposures should
be performed in closed systems. Closed systems
require that materials to be processed be brought
into the workplace in sealed containers and be
emptied into storage tanks, thus preventing
employee contact or exposure to the substance.
Glovs box6s or othor slmilsr contsinrnont dsvicos
also may be appropriate when working with such
substances. Unfortunately, not all operations lend
themselves to such an approach.
Changing a Process Another way to control
hazards is to change a work operation to minimize
worker exposure. For example, vapor degreasing
ipiiSihsci with dip h.^vino
adequate ventilation controls rather than by
manually washing parts in open containers.
IA/Kav'a K o-v o i i c \Kir\r^ Ka
laUICillV/ll VVIldC pWOOII.^ 1 ^, I lO^CXI WVWi)\ I
isolated or enclosed to reduce employee exposure.
An example is the use of acoustic panels to reduce
noise. The isolated equipment can be operated by
rtftiiuic t^yuiiiiut nuiii a fji ik^uciiiwi i. i i
degree of isolation would be determined by the
hazard involved, the amount of exposure, and the
work patterns.
Wet Methods Wet methods are used to control or
reduce dusts that occur during dry processes. This
control is widely used because it is a simple,
effective, and inexpensive way to minimize
potential health and safety hazards. For this control
method to work most effectively, appropriate
wetting agents must be used and proper
procedures should be followed in disposing of
waste.
Local Exhaust Ventilation Local exhaust
ventilation at the source of a contaminant captures
hg^grdous substcinc6s b6for6 th6y 6SC3p6 into tho
workplace environment. Local exhaust ventilation
is the preferred control method because it removes
air contaminants from worker’s breathing zones.
i/hon
closed systems, isolation, or changing the process
are not compatible with the work being performed.
nrya r'-a I
1^1 OI,
ventilation systems add or remove air from the
workplace to keep the concentration of air
contaminants below hazardous levels. General
x: I M '.>1 ^ U> M M I ^ 1 f I
venmaiiun is sinipiy iiit? iiuiiMc»i «aii iiww mivywyn
open windows or doors, fans, and roof ventilators.
General ventilation only dilutes air contaminants,
unlike local exhaust ventilation which removes air
contaminants. For this reason, general ventilation
should not be used to remove large quantities of air
contaminants from the workplace or to control
major sources of air contamination. When using
general ventilation systems, it is important not to
rSCirCUlatS tOXiC SUbStaHCGS thrOUynOUt tne
workplace. Another method that can be used when
engineering controls are insufficient or not yet
installed is administrative control.
Admjnistratly@ Controls
Worker Rotation One type of administrative
control is to reduce employee work periods for
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example, employees who have worked for 4 hours
at an operation involving exposure to hazardous
substances/agents could be transferred or rotated
reducing their 8-hour average exposure. Such
administrative controls, however, should not be
viewed as long-term substitutes for engineering
controls, ventilation controls, or other miore
effective methods of reducing exposures to
hazardous substances. Some OSHA standards do
not permit worker rotation as a means of keeping
their exposures below permissible levels.
Substitution Occasionally, a less hazardous, but
equally effective, substance than that being used
may be available. If this is so, using the substitute
may lessen the hazard.
Personal Protective Equipment
When it is not possible or feasible to eliminate
hazardous levels of airborne contaminants from the
workplace through engineering or work practice
controls, or until they are installed, the employer
may have to provide persona! protective equipment
to workers to reduce or eliminate harmful
exposures. Personal protective equipment,
however, should be used only when other more
3l m
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ai ^ iiVL pvooivic;.
Personal protective equipment does not minimize
or eliminate the source of the exposure. As a result,
if personal protective equipment fails to work
propGrIy, workGrs suffer imrnGdiStG sxposurG to thG
toxic substance. Personal protective devices
include eye and face protection (safety glasses,
goggles, and face shields); hearing protection (ear
muffs and ear plugs); protective clothing (gloves,
coveralls, aprons, and boots); protective skin
barriers (creams and lotions); and respirators. The
employer must furnish the proper type of personal
protective equipment for the specific work
opGTStlons snd GxposurGS. For GxsmpiG, whsn
employees are working with a particular solvent,
they should be provided with the appropriate
gloves, respirators, goggles, or other protective
riaor noaHciH nm\/ont harmfiil cl^in r-r^nfanf nr
inhalation.
6
An appropriate NIOSH/MSHA (Mine Safety and
Health Administration) approved respirator should
be selected for the particular hazard or work
in v*/KinK +Hci rcieni ro+rxr ie tn iicaH
d I V I I Syi I I I I I «. Itl VVMIVIt VI 1^ i UVWI VSi/ VVVr
(e.g., dust masks should not be used to protect
against vapor exposures). In addition, the type of
air contaminant, its expected maximum
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UU( iwvi lii ciii wi 1 , 111 ^ pwootumiy \ji wAy^^ii vj^i tvy ,
the working life of the respirator, and proper
respriator fit should be determined before work is
begun. Before providing respirators, employers
^ i ■ I ^ 1*^ t j ^ ^ 1^ % A t ^ ■« ^ 1^ ^ A
diiuulu Mavc Liic wuirve;is) iic;eiiLii cvatuaicu uy a
physician to determine the workers’ ability to wear
respirators. A thorough respiratory protection
training program also must be provided.
Other Protective Measures
Personal hygiene, use of regulated areas (areas
where unauthorized employees may not enter),
mfirtinal survnillannfi nrnnrams hniifiekefinino,
equipment maintenance, and training are other
components of a well-designed employee safety
and health program that should be considered by
ths srnploysr.
Personal Hygiene Employers should make
handwashing facilities readily available to
employees working with or near toxic substances.
It is important that workers be able to wash
promptly in case of accidental splashes of toxic
substances; when appropriate, emergency eye¬
wash facilities also must be provided. Where called
for, convenient access to showers also should be
provided. Eating, drinking, and smoking, as well as
storing foods, should be forbidden in areas where
toxic substances are present.
Regulated Areas Where biological hazards or
proven or suspected cancer-causing agents are
used or handled, they should be properly marked
to inform workors of th6 potontis! hszsrds snd tho
regular and emergency procedures required.
Unauthorized persons should not be permitted to
enter regulated areas. Employers should also
»v r\<i> I
to change and dispose of contaminated clothing
and equipment when they leave. Regulated areas
usually are provided with negative-pressure
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reoulated areas).
Medical Surveillance Medical surveillance is an
I tTA ^4* r% ■*« f r% ^ r% wn **% I I f
iiiipui Lain (jdi L ui dll d ddic;iy dilu iit^diiii
or medical program. It should include a physical
examination for all workers consisting of a
thorough work history and an examination for ill
effects from any exposures to toxic and hazardous
«!i ih«!tanr.fi.<5 Aiirtinmptrin rhearinnt tpats must hp
— . ^ ^ ^ ^ -- ...--
part of the physical examination when workplace
noise levels are above 85 dB for an 8-hour TWA.
Results of these exams provide baseline data that,
r'nmnaraH \A/ith tha rocnitc nf narinHir OYamQ alInxA/
ww . w%- ». .. . WWV,.. ..W . .w,
detection of the harmful physical effects of
particular work operations and evaluation of their
severity. Medical records must be maintained by
the employer and made available to employees
who 3sk for thorn
In addition to periodic medical examinations,
workplace exposure monitoring tests should be
ir^f^H /-vrv Q ram lie
continuously monitors the work environment for
airborne contaminants and triggers an alarm when
concentrations exceed safe levels should be
physical examinations and workplace exposure
monitoring can be an effective method of
discovering potential occupational safety and
imdiui iid^diud. vvuiivcfd may aiou uuoci vc
monitoring and may review their monitoring
records.
Equipment Maintenance All employers should
make sure that adequate maintenance schedules
are established and adhered to. Poor maintenance
of workplace equipment usually causes faulty
operation of machinery, which can result in
increased workplace accidents and illnesses, ,A
regular maintenance schedule should include
periodic shutdowns of all equipment. Employees
performing maintenance should be provided with
any special personal protective equipment needed
for the work.
Good Housekeeping Employers should establish
and maintain good housekeeping practices, such
as providing a clean and orderly workplace, and
facilities for personal hygiene, eating, adequate
washing, and waste disposal. Employers must
ensure that spills of hazardous substances are
cleaned up immediately and that the waste is
properly disposed of. Work practices also should
be in effect for the safe disposal of toxic chemicals
Training Electronics and semiconductor
manufacturers should have effective training
programs that deal with employee working
conditions. The training should include information
on the types of hazards in the workplace, on the
adequate coverage of personal protective
equipmient, on the medical surveillance program,
and nn fimfirofinnv situations
7
Responding to Workplace
Emergencies
In addition to establishing effective safety and
health programs, employers should prepare their
workers to handle workplace emergencies.
Planning
Top management support and commitment and the
involvement of all employees are essential to an
effective emergency action plan. Where required
by OSHA, plans for firms with more than 10
employees should be written; smaller companies
may communicate their plans orally.
Managers should review the plan with employees
initially and whenever the plan, or the employees’
responsibilities under it, change. The plan should
be reevaluated and updated periodically.
Emergency procedures, including the handling of
any toxic chemicals, should include the following;
• Escape procedures, routes, and exits,
designated on maps.
• Special procedures for employees who perform
or shut down critical operations.
• A system to account for all employees after
evacuation.
• Rescue and medical duties for employees who
perform them.
• Means for reporting spills, fires and other
emergencies, including names and phone
numbers.
• Contacts for further information about the plan.
• A critique of the response and follow-up to
ensure that suggested corrections are
implemented.
Chain of Command
An emergency response coordinator and a back-up
coordinator should be designated. The coordinator
may be responsible for overseeing plant-wide
operations, performing public relations, and
ensuring that outside aid is always available. A
back-up coordinator ensures that a trained person
is always available. Duties of the emergency
response coordinator include the following:
• Determining whether a situation requires
activating emergency procedures.
• Overseeing all emergency activities, including
evacuating personnel.
• Ensuring that outside emergency services such
as medical aid and local fire departments are
called in when necessary.
• Directing the shutdown of plant operations when
necessary.
Emergency Response Teams
Members of emergency response teams should be
thoroughly trained for potential emergencies and
physically capable of carrying out their duties in
accordance with Title 29 Code of Federal Regulations
1910.120. They should know about the hazards in
the workplace and be able to judge when to
evacuate personnel or to depend on outside help
(e.g., when a fire is too large for the in-house team
to handle). One or more emergency response
teams should be trained in using the following:
• Various types of fire extinguishers.
• First aid, including cardiopulmonary
resuscitation (OPR),
• Shutdown procedures.
• Evacuation measures.
• Chemical spill control procedures.
• Self-contained breathing apparatus (SCBA).
Response Activities
Effective communication is vital in emergency
situations. An alternative area for a
communications center, other than management
offices, should be established in the plan and the
emergency response coordinator should operate
from this center. Management should provide
emergency alarms and ensure that employees
know how to report emergencies. An updated list
of key personnel and their off-duty telephone
numbers should be posted in a convenient place.
A system should be established that requires a
person in the control center to notify police or
emergency response team members of persons
believed missing when a facility has been
evacuated.
Effective security procedures, such as cordoned off
areas, can prevent unauthorized access and
protect vital records and equipment. Duplicate
records should be maintained on off-site locations
for essential accounting files, legal documents, and
lists of employees’ relatives to be notified in case of
emergency.
8
I
Training
tvery employee neeas to Know aetaiis oi tne
omornonr‘\/ artinn nian inoliidinn ax/ar*! iatlr\r» rxlanc
. IWI y IW jr vcwv.v,. ^ I
alarm systems, reporting procedures for personnel,
shutdown procedures and types of potential
emergencies. Drills should be held at random
ir»+£ir\/alc at loact anniialK/ anH iiar>liiH/a if nocciKlo
VUI<J, UL UlltJ I I < V> I Cl VJ , M ^ Cl Cl I Cr ,
outside police and fire authorities.
Training should be conducted initially, when new
/5i rv» rvl/<acie area hiroH araH at leaact araraitallv/
^1 M ImTI C/y Ui C/ IIMC^VJ, Ctl ICI Ul ICfCAOI. UllllCIUliy
thereafter. Additional training is needed when new
equipment, materials or processes are introduced,
when procedures have been updated or revised, or
vr\rr'ioeao ttaot «rraIv/ea^ rfar»
vv I Id I wi oc;o oiiv,Jvv iticxi. pepi tv^i inaiicic^
is inadequate.
Personal Protection
Employees exposed to accidental chemical
splashes, unknown atmospheres with inadequate
oxygen or toxic gases, fires and live electrical
winnQ, or similar conuitions during GmGrgGnciGS
need personal protective equipment, including the
following:
• Safety glasses, goggles or face shields for eye
protection.
• Properly selected and fitted respirators.
• Special body coverings, gloves, hoods and
boots.
• Body protection for abnormal environmental
conditions such as extreme temperatures.
Medical Assistance
Hazard Communication
OSHA's hazard coniinunication standard, which
applies to the electronics industry, establishes
uniform requirements to make sure that the
hazards of all chemicals produced, imported, or
used in Li.S. workplaces are evaluated, and that
this hazard information is transmitted to affected
employers and exposed employees.
Chemical manufacturers and importers must
r'rvnwcjx/ ha-rarH infrirmati/^n fn HnvA/nctroam
\_'V_/i(v\_>y iiLA^div.! iiiiw>iii(.Awi>-/ii vt\./vTiiwviw<>iii>
employers by means of labels on containers and
material safety data sheets (MSDS's). In addition,
all covered employers are required to have a
lazar
rr» rr» i
information to their employees by means of
container labeling and other forms of warning,
MSDS’s, and training.
The hazard communication program will ensure
that all employers receive the information they
need to inform and train their employees properly
and to design and put in place employee protection
programs. The program also will provide necessary
hazard information to employees, so they can
participate in, and support, the protective measures
instituted in their workplaces.
Employers whose workplaces are not near an
infirmary, clinic or hospital must have someone on¬
site who is trained in first aid, have medical
personnel readily available for advice and
on/H Qmoi'nonr'N/
UV/i lO U I t.Cii.1 I I, wii»-* sj Vo V s./nj j«/ v>i I
procedures.
In addition, in any emergency, first-aid supplies
Oftuuiu uc avaiiauic? iv^«
emergency phone numbers should be posted in a
conspicuous place near or on telephones, and
ambulance services should be prearranged and
svailsblG on short notiCG.
Recordkeeping
The employer must keep records on exposure
^ 1^ 1 1 •»/-« rv^ <~ir^ + r' •-if-i rN I rN\ I
I i tri 11^11 lo aiiu um c;i i i y iiicvjiuai
examinations. The records on measuring exposure
must include a description of the procedure(s); the
names, social security numbers, job classifications
and GxposurG IgvgIs of GmployGGSi ths typGS of
protective devices worn and length of time the
devices have been in use.
Medical records must inoiude the name, social
security number and description of the duties of
the employee, a copy of examination and test
results, a copy of the physician's written opinion,
any employee medical complaints related to
workplace substances, a copy of the applicable
OSHA standard and appendices, and a copy of the
information provided to the physician.
9
Employee exposure records must be kept for 30
years. Medical records must be kept for at least
the duration of emplpyment plus 30 years. Both
exposure measurement records and medical
records must be made available on request to the
Assistant Secretary of OSHA and the Director of
NIOSH for examination and copying.
Measurement and medical records also must be
made available to employees, former employees,
or their designated representatives for
examination and copying.
OSHA rules require that each employer with 11 or
more employees maintain a log of recordable
work-related injuries and illnesses (OSHA Form
200). Injuries include those that result in death,
loss of consciousness, restriction of work or
motion, transfer to another job, or medical
treatment beyond first aid. Each injury or illness
on the log must be detailed in a supplementary
record (OSHA Form 101 or equivalent). Each year,
during the month of February, a summary of
injuries and illnesses must be posted in the
workplace. Records of injuries and illnesses and
supplementary records must be retained in each
establishment for 5 years following the end of the
year to which they relate. These records are
valuable for employees because they reflect
where serious hazards exist in the workplace.
They are important to the employer in analyzing
the effectiveness of safety and health programs.
They are also important to OSHA inspectors in
deciding whether to conduct a complete workplace
inspection and, if so, where to concentrate their
attention.
Employer and Employee
Responsibilities
An employer's commitment to a safe and healthful
environment is essential in the reduction of
workplace injury and illness. This commitment can
be demonstrated through personal concern for
employee safety and health, by the priority placed
on safety and health issues, and by setting good
examples for workplace safety and health.
Employers should also take any necessary
corrective action after an inspection or accident.
They should assure that appropriate channels of
communication exist between workers and
supervisors to allow information and feedback on
safety and health concerns and performance. In
addition, regular self inspections of the workplace
will further help prevent hazards by assuring that
established safe work practices are being followed
and that unsafe conditions or procedures are
identified and corrected properly. These
inspections are in addition to the every day safety
and health checks that are part of the routine
duties of supervisors.
Since workers are also accountable for their safety
and health, it is extremely important that they too
have a strong commitment to workplace safety and
health. Workers should immediately inform
supervisors or their employers of any hazards that
exist in the workplace and of the conditions,
equipment, and procedures that would be
potentially hazardous. Workers should also
understand what the safety and health program is
all about, why it is important to them, and how it
affects their work.
Finally, employers who want help in recognizing
and correcting safety and health hazards and in
improving their safety and health programs can
receive assistance from a free consultation
service in their area largely funded by the
Occupational Safety and Health Administration.
The service is delivered by state governments
using well-trained professional staff. The service
offers advice and help in correcting problems and
in maintaining continued effective protection. In
addition to helping employers identify and correct
specific hazards, consultants provide guidance in
establishing or improving an effective safety and
health program and offer training and education
for the company, the supervisors, and the
employees. Such consultation is a cooperative
approach to solving safety and health problems in
the workplace. As a voluntary activity, it is neither
automatic nor expected. It must be requested. For
additional information, contact one of the
consultation programs or the nearest OSHA
Regional Office listed in this publication.
10
If /
J i
M
AoDendix
:•« ljSmU
ncaiiii nci^^iuo iii niyii- iwii I'luuuuiiuii
Type of work
Chemicals commonly used
Health effects
Deareasina and cleanina
cr .^ • • .57
Meth\/lene chloride
Dermatitis (skin disease), nausea,
eye damage
Methylethyl ketone
Narcosis (stupor, unconsciousness),
anesthesia
Carbon tetrachloride
Depression, suspected carcinogen
(cancer-causing agent)
Trichloroethylene
Headaches, narcosis, nerve damage,
suspected carcinogen
Wafer fabrication
Silicon dioxide
Silicosis (dust-caused lung disease)
Wafer doping
Arsenic
Jaundice, liver and heart damage
Antimony
Tiredness
(Q
1 1 iwopi uo
D/*vr^A
LJX^I 1C XJCOLI UULIVI 1
Wafer diffusion
Phosphine
vomiting, diarrhea
Arsenic
laiinHioA liv/Af* anH hAai*f Hamann
iivCl llV^(,i4lk\_<LAII T* 1 1-
Photo-etching
Hydrofluoric acid
Skin and eye problems, chemical
burns
Phosphoric acid
Chemical burns
Hydrochloric acid
Chemical burns
Nitric acid
Chemical burns
Encapsulation
Liquid epoxy resins
Skin irritants, sensitizer
Polyurethane plastics
Eye and respiratory tract irritant,
sensitizer
Chloronaphthalenes
Suspected carcinogen
PCBs
Chloracne (skin disease), liver and
kidney damage
Electroplating
Nickel oxide
Dermatitis (“nickel itch”), risk of
limr-i ft*Ann
luii^ aiiu oiiiuo tt/anuc/i iiuiii ii ii faiaiiui i
of dust
r^\/aniHA caltc
nArmatitic a\/a anH rAer^irafrtrx/
iiiwtttiwy Vi'jrvi' tiAiiwf y
irritant, nausea and vomiting,
tiredness
Chromic acid
Suspected carcinogen
r^aHrr^ii «m
1 1 M u 1 1 r
\A/afar irt limrto
TVaiCI IC7Ldll.IV/ll III iUII^O
Driiiing and shearing
ribrous glass
Dermatitis, respiratory damage
Bonding and soldering
Cadmium oxide
Respiratory damage, liver and
kidney damage
Lead oxide
Reproductive hazards, anemia,
l^n/*t ■ 1 ••/t • l*\*'*nt*'t <*4t-**! jrt
III cApuouic. uiaiii uaiiia^c
Zinc oxide
Respiratory damage
Zinc chloride
Respiratory damage
Assembly work
Stress, eye strain, fatigue, back strain
Source: Kenneth Geiser, “Health Hazards in the Microelectronics industry” Int J Health Serv 16(1):112,1986, as
rnmniloH frnm P.inHw Talhnt anH AnHraa Hrirkn “HaTarrla nf thA FlArtrnnif^a InHi iQtrv” ri inniihliahArt matarlah
.. W<. . W.. .WJ .w r . .. —w w. ...W ..WV. W. ..WW .. J
References
Colletta, Gerard C., et. al. Chemical Safety
Handbook. 2nd ed. Santa Clara, California:
American Electronics Association, December
1986.
Communication Workers of America. “Hazards in
the Electronics Industry.” Occupational
Safety and Health Reporter. Vol. 17. No. 23.
Washington, D.C.: Bureau of National Affairs,
Inc., November 4, 1987. Pp. 910-911.
La Dou, Joseph, ed. State of the Art Reviews:
Occupational Medicine—the
Microelectronics Industry. Vol. 1. No. 1.
Philadelphia: Hanley and Belfus, Inc.,
January-March, 1985.
Santa Clara Center for Occupational Health.
Unmasking the Hazards ... A Workers Guide
to Job Hazards in the Electronics Industry.
San Jose, California, 1981.
State of California. Department of Industrial
Relations. Division of Occupational Safety and
Health. Semiconductor Industry Study. 1981.
U.S. Department of Health and Human Services.
Public Health Service. Centers for Disease
Control. National Institute for Occupational
Safety and Health. Hazard Assessment of the
Electronic Component Manufacturing
Industry. DHHS (NIOSH) Publication No.
85-100. Cincinnati, February 1985.
OSHA Consultation Project Directory
State
Telephone
Alabama .
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District of Columbia
Florida.
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.... (205) 348-3033
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. (517) 353-8250 (H)
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. (612)297-2393(3)
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(Toll-free in State)
(412) 357-2561/2396
(809) 754-2134/2171
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_(206) 586-0961
.... (304) 348-7890
. (608) 266-8579 (H)
(414) 521-5063 (S)
.(307)777-7786
H = Health
S = Safety
12
Heiated Publications
BLS Publication 0MB No. 122o-0o29—Recordkeeping
s^uiMviiiico ivri wv»u|i^ci&iwi lai iiijuiiv9 aiivi
UbHA 3U8S - HOW to Prepare tor workplace
OSHA 3084 - Chemical Hazard Communication
OSHA 3077 - Personal Protective Equipment
D^HA . Rocnirsitorv Prr\f
j . «w»ww«..w««
Employer
A single free copy of the above publications can be obtained from OSHA field offices or OSHA Publications
Office, 200 Constitution Avenue, N.W., Room N3101, Washington, D.C. 20210, (202) 523-9667.
U.S. Department of Labor
Occupational Safety and Health Administration
Regional Offices
Ranlnn |
(CX "ma, me, NH, RI, VT*)
133 Portland Street
1st Floor
Boston, MA 02114
Telephone: (617) 565-7164
Region II
(NJ, NY,* PR,* VI*)
201 Varick Street
Room 670
New York, NY 10014
Telephone: (212) 337-2378
Raninn \/|
(AR,Ia, NM,* OK,TX)
525 Griffin Street
Room 602
Dallas, TX 75202
Telephone: (214) 767-4731
Region VII
(ia,* ks, mo, NE)
911 Walnut Street
Room 406
Kansas City, MO 64106
Telephone: (816) 426-5861
REGION III
(DC, DE, MD,* PA, VA,* WV)
Gateway Building, Suite 2100
3535 Market Street
Philadelphia, PA 19104
Telephone: (215) 596-1201
Region VIII
(CO, MT, ND, SD, UT,‘ WY*)
D. ■^c.-rc
cti DUiiUMiy, nuuMi lu/u
1961 Stout Street
Denver, CO 80294
Telephone: (303) 844-3061
Renjon IV
(AL, FL, GA, KY,* MS, NC,*
SC,* TN*)
1375 Peachtree Street, N.E.
Suits 587
Atlanta, GA 30367
Telephone: (404) 347-3573
(ILJN,* Ml,* MN,* OH, Wl)
230 South Dearborn Street
Room 3244
II ar\af\A
v/iiiv/ayu, II. uuuv/'t
Telephone: (312) 353-2220
Region IX
(AZ,* CA,* HI,* NV*)
71 Stevenson Street
Room 415
San FranciscQ, CA 94105
Telephone: (415) 995-5672
Kegion x
in HR
/Ak'
V-
VWA *\
Federal Office Building
909 First Avenue
Room 6003
Teleohone: (206) 442-5930
* These states and territories operate their own OSHA-approved job safety and health programs (the
Connecticut and New York plans cover public employees only and OSHA currently is exercising
concurrent private-sector Federal enforcement authority in California).
